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    jPergamon

    Elrcr rochmca Acm Vol 40 No 4 393 401p 1995

    Copyright < 1995 Elsewermnce Ltd.

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    reserved

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    MODELING OF IMPEDANCE MECHANISMS IN

    ELECTROPOLISHING

    MICHAEL MATLOSZ

    Laboratoire des sciences du genie chimique CNRS, Ecole nationale suparieure des industries chimiques,

    1, rue Grandville B. P. 451, F-54001 Nancy, France

    (Received 21 April 1994)

    Abstract-Recent theoretical results concerning mechanisms for mass-transport-limited electrochemical

    polishing are summarized and discussed. The underlying physical bases for both salt-film and acceptor

    models are presented with particular emphasis on the differences

    in their alternating-current impedance

    behavior. Direct comparison of the dependence on operating conditions of characteristic features of the

    impedance diagrams in the high-frequency range provides a clear experimental basis to distinguish

    among the various mechanisms that can lead to the polishing phenomenon in specific cases.

    Key words: mathematical modeling, alternating current impedance, electropolishing, anodic dissolution,

    kinetic mechanism.

    NOMENCL TURE

    Greek symbols

    Tafel constant

    bulk acceptor concentration/mol cmS3

    characteristic

    capacity of the high-

    frequency loop/F cm- ’

    double-layer

    capacity of the metal/

    electrolyte interface/F cm- ’

    dif n coefficient of the acceptor species/

    Faraday constant/96 487 C molt ’

    current density/A cm- *

    pre-exponential

    factor (solid-state

    conduction), or exchange-current density

    (Tafel kinetics)/A cm _ 2

    steady-state current density/A cm - ’

    rate constant for cation solvation by the

    acceptor/s

    number of acceptor molecules needed to

    solvate a single cationic species

    high-frequency impedance limit/ohm-cm2

    diameter of the high-frequency impedance

    loop/ohm-cm*

    resistance of the porous film (per unit

    a

    Y

    6

    parameter in the solid-state conduction

    expression/cm V- ’

    dimensionless parameter in the model

    developed in reference[6]

    diffusion-layer thickness/cm

    porous-film porosity

    electrical permittivity of the compact layer/

    Fcm-’

    surface coverage of adsorbed cations

    thickness of the compact film/cm

    thickness of the porous film/cm

    potential at the inner limit of the porous

    layer or potential at the metal/electrolyte

    interface/V

    potential at the outer limit of the porous

    layer/V

    potential at the reference

    electrode

    position/V

    angular frequency/rad s-

    INTRODUCTION

    length)/ohm-cm

    Electropolishing is a surface finishing process

    ohmic resistance of the electrolyte/ohm-

    cm2

    based on anodic dissolution of a metal or alloy in an

    appropriately chosen electrolyte. Applications of the

    ohmic resistance for a primary current

    distribution/ohm-cm2

    technique are numerous and range from the pol-

    ohmic resistance for a uniform current

    ishing of stainless steel cutlery to the preparation of

    distribution/ohm-cm2

    samples for transmission electron microscopy. The

    polishing phenomenon is characterized by the elimi-

    time/s

    nation of micro-roughness (leveling) and the absence

    c/c,, dimensionless surface concentration

    of crystallographic and grain-boundary attack

    of the acceptor

    (brightening) and results in the production of

    electrode potential/V

    smooth, bright surfaces. A complete summary and

    metal cation valence

    discussion of the scientific literature concerning elec-

    393

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    394

    M.

    MATLOSZ

    tropolishing from its patented publication by

    Jacquet in 1930[1-33 up to and including research

    results from the mid-1980s can be found in the

    review by Landolt[4].

    Mass-transport limitations for anodic dissolution

    are generally believed to be responsible for electro-

    polishing, and this view is supported by the observ-

    ation in numerous experimental systems of polishing

    for anodic dissolution along a limiting-current

    plateau. Leveling behavior for anodic dissolution at

    the limiting current can be interpreted as the prefer-

    ential dissolution of protrusions on the order of the

    diffusion layer due to their greater accessibility for

    diffusive transport. Brightening can also be inter-

    preted as a result of mass-transport control, but on a

    smaller scale where diffusion is essentially isotropic

    and independent of the crystallographic orientation

    and grain structure of the metallic surface.

    Whether or not anodic dissolution is mass-

    transport controlled depends on the experimental

    system. Unlike cathodic limiting-current plateaux in

    electrodeposition, which are the inevitable result of

    the depletion of metal cations in the diffusion layer

    near the electrode surface, anodic limiting-current

    plateaus do not necessarily appear with increasing

    overpotential in all cases since the surface concentra-

    tion of dissolving metal ions will generally rise with

    increasing anodic current. Mass-transport-limited

    anodic dissolution requires therefore the presence of

    an additional mechanistic step, such as the precipi-

    tation of a salt film (which limits the surface concen-

    tration to the saturation value of the metal cations)

    or a diffusion limitation for transport of an acceptor

    molecule necessary for solvation.

    It is of consideral scientific and technological

    interest to be able to determine clearly which of the

    possible mechanisms is at work in a given polishing

    system in order to understand the chemistry

    involved and the role of the various operating

    parameters. For this purpose, several studies of salt-

    film and acceptor systems have been undertaken in

    the past decade, including theoretical work on the

    shapes and sizes of the characteristic loops of the

    impedance diagrams measured along the hmiting-

    current plateau. The results of two of these studies,

    summarized here, yield considerable insight into the

    transport mechanisms involved and provide a solid

    basis for determining the likely mechanism in a given

    experimental system.

    The two models chosen for discussion have been

    studied theoretically in some detail over the past

    several years and represent special limiting cases of

    the salt-film and acceptor approaches. The first, the

    duplex salt-film model proposed by Grimm et aI.[S],

    attempts to characterize the role of compact and

    porous layers in the frequency response of complex

    precipitate films. The second, the adsorbate-acceptor

    mechanism proposed by Matlosz et a/.[6], examines

    the role of adsorbed intermediates and acceptor-

    molecule transport in the behavior of polishing

    systems in the absence of films. Both types of mecha-

    nism have been observed and studied in experimen-

    tal polishing systems.

    The objective of this article is to present the

    underlying physical bases of the models and the

    principal results of the theoretical analyses in order

    to obtain a clear pictue of the differences and simi-

    larities in the approaches. For this reason, quaht-

    ative arguments will be favored and mathematical

    developments limited to the greatest extent possible.

    In the interest of clarity, some notation has been

    modified slightly with respect to the original refer-

    ences, and model behavior has been simplified some-

    what in certain cases. In particular, the intermediate

    surface reaction step discussed in the acceptor model

    in [6], and which is not strictly necessary for pol-

    ishing, has been eliminated in the present discussion

    (an approach equivalent to the case of y = 0 in[6]).

    More detailed mathematical treatments and addi-

    tional theoretical support for the conclusions report-

    ed here can be found in[5] and[6].

    THE DUPLEX SALT-FILM MODEL

    A physical picture of the duplex salt-film model is

    represented schematically in Fig. 1. The origin of the

    anodic limiting current is the salt-film precipitate

    DUPLEX SALT FILM MODEL

    oxidation

    Fe + Fe+* +

    2 e

    precipitation

    dissolution

    ‘r

    r’

    w

    (diffusion) Cl -

    sat

    L

    Reference

    k:

    - Cbulk

    compact

    dielectric

    film

    diffusion

    layer

    Fig. 1. Schematic illustration of the duplex salt-film model.

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    Modeling of impedance mechanisms

    395

    which fixes the metal cation concentration at its

    saturation value at the salt-film/electrolye interface.

    The rate of transport of the cations across the diffu-

    sion layer into the bulk electrolyte limits the anodic

    dissolution rate. The precipitate itself is composed of

    two regions. In the porous-film region, the pores of

    the precipitate are filled with electrolyte solution (at

    the saturation concentration) and the mobile charge

    carriers (anions and cations) transport the current by

    migration in the electric field in the pores. In order

    to explain the high electric resistance of the precipi-

    tate films, the porous layers are generally attributed

    a rather low porosity and taken to be several

    microns thick. In fact, however, it is not possible to

    distinguish clearly whether an increase in film resist-

    ance is due to an increase or decrease in porous film

    resistance is due soley to a change in film thickness.

    In the compact-film region, the precipitate forms a

    solid dielectric barrier through which the cations are

    transported by solid-state ionic conduction in the

    presence of a much higher electric field. Due to the

    lower mobility of the ions for solid-state transport,

    compact films are generally considered to have

    thicknesses on the order of 10 nm, much thinner than

    corresponding porous layers. Limiting cases of inter-

    est for the duplex model arise if one or the other of

    the two regions can be neglected. In such cases, one

    may speak of a porous-film model or a compact-film

    model, and most of the results presented here will be

    restricted to one or the other of these limiting cases.

    Although the duplex model is viewed here as two

    distinct layers, it is possible to consider an alterna-

    tive (and perhaps more realistic) interpretation as a

    single film of variable properties with a gradual

    change from a region of high porosity to a region of

    low porosity with simultaneous solid-state and

    liquid-state transport. Both interpretations result in

    essentially the same behavior, however, with the

    presentation as two separate regions offering the

    advantage of clearly separating solid-state and

    liquid-state effects. For this reason, the description

    below will be restricted to the two-film approach.

    Discussion of the physical basis of the model is

    somewhat simplified if one considers the dissolution

    of a single metal into a binary electrolyte. Following

    Grimm et 0/.[5], the presentation here will focus on

    the dissolution of Fe into an electrolyte of FeCI,.

    Transport processes are taking place in three distinct

    layers: the electrolyte diffusion layer, the porous-film

    layer, and the compact-film layer. In the electrolyte

    diffusion layer, metal cations Fe’* are transported

    outward toward the bulk electrolyte by both diffu-

    sion in the concentration field and migration in the

    electric held, whereas the counterions Cl --, whose net

    steady-state fux must be zero, are drawn simulta-

    neously outward by diffusion and inward by migra-

    tion. The migration of both ions contributes to the

    electrolyte conductivity and to net current flow. The

    resulting steady-state concentration profile is consis-

    tent with electroneutrality and shows a rise in FeCI,

    concentration from its bulk value up to a saturation

    concentration at the salt-flim/electrolyte interface.

    Transport processes in the binary electrolyte in the

    pores of the outer salt film are somewhat different

    from those in the liquid diffusion layer. Contrary to

    the diffusion layer, the concentration in the pores of

    the outer film cannot vary with position, since rapid

    equtlibratton with the solid prectpttate and the

    requirement of the electroneutrality force the con-

    centration of the electrolyte in the pores to remain at

    the same saturation value throughout. As a result,

    diffusional transport for both ions is eliminated, only

    migration of the ions in the electric field remains,

    and the porous layer acts as a simple ohmic resistor.

    Since Fe”

    cations and Cll anions have similar

    mobilities, it is reasonable to assume that migration

    will cause cations to be transported outward

    through the film by migration, whereas anions will

    tend to be drawn inward. There is clearly no net

    transport of chloride ions into the dissolving iron

    electrode, and the chloride transported into the

    porous film must therefore precipitate out at the

    bottom of the pores. Since (for constant film

    porosity) the film thickness must remain constant at

    steady state, one sees clearly that the precipitation of

    freshly formed FeCl, beneath the film must be com-

    pensated by equivalent dissolution of the precipitate

    at the outer-film/electrolyte interface. Physically, the

    porous-film model represents a dynamic process

    with a salt film of constant thickness continually

    being renewed by precipitation in the inner region

    beneath the pores and dissolution at the outer edge

    along the film/electrolyte interface. The fact that the

    layer thickness is conserved by precipitation of

    FeCI, solid beneath the film is an interesting result,

    and one might speculate as to whether the mechani-

    cal pressure built up by the precipitating layer

    beneath the film may not be responsible in some way

    for cracks and fissures leading to film porosity.

    Under the transient conditions resulting from

    potential modulation, the dynamic steady state of

    film renewal is perturbed, and the resulting imped-

    ance response depends on the nonzero rates of chlo-

    ride transport and the corresponding variations in

    film thickness with time. During a growth phase, for

    example, a net flux of Cl- is drawn toward the elec-

    trode surface by an increase in migration that is not

    totally compensated by diffusion since the concentra-

    tion profiles are fixed by the saturation and bulk

    values. During a thinning phase, the net flux of Cl

    is reversed and the thickness of the film decreases.

    For the inner compact layer, it is possible to

    imagine that only the Fe+2 cations are capable of

    significant mobility in the solid phase (transference

    number of Cll zero in the solid). In that case, the

    migration flux of the iron cations corresponds to the

    net anodic current and the film is not renewed as in

    the case of the porous outer region. If chloride ions

    do have significant mobility in the soild, their trans-

    port through the compact film will result in renewal

    of the film at constant steady-state thickness similar

    to that described for the porous layer. In the most

    general case of a complete duplex film with Cl

    mobility in both layers, the renewal rates of the

    layers will depend on the solid-state and liquid-state

    transference numbers for chloride ions and material

    balances at the interface between the two regions.

    Figure 2 shows the relative contributions of the

    porous layer, compact layer and electrolyte solution

    to the overall potential drop observed in an experi-

    mental polishing system. In the example shown, the

    overpotential for Fe dissolution at the inner metal/

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    396

    M. MATLOSZ

    anode

    $0

    POTENTIAL DROP : SALT FILM MODEL

    Reference

    Fig. 2. Sources of potential drop in salt-film systems.

    compact-film interface has been neglected, and the

    role of the potential drop across the compact layer

    has been emphasized. For typical high-field conduc-

    tion of metallic cations, the steady-state current

    density transported across the compact layer can be

    represented as follows,

    i,, = i,

    exp(“(‘, ‘O))

    where

    (V - +o)/

    denotes the electric field strength

    across the compact layer of thickness A,, x a con-

    stant characterstic of the jump spacing for solid-state

    ionic transport in the precipitate crystal, and i, a

    kinetic constant related to the number of charge car-

    riers present in the compact film.

    For operation along the limiting-current plateau,

    increasing the applied potential does not change the

    current density (which is limited by the transport of

    Fe+’ across the electrolyte diffusion layer), and con-

    sequently the electric field strength in equation (1)

    must be conserved. This is accomplished by an

    increase in the thickness 1, which compensates for

    any increase in

    V - qSo

    in the absence of a porous

    layer.

    For transient operation, the charging of the dielec-

    tric layer must be taken into account along with the

    high-field conduction. The thicker the dielectric film,

    the smaller the charging current necessary to estab-

    lish the steady-state field. With this interpretation,

    the current density under transient or modulated

    conditions can be expressed by addition of a second

    term to equation (I) as follows:

    where Em_,,,

    denotes the electrical permittivity of the

    compact film.

    When a porous layer is present, the current

    density through the porous region can be expressed

    by the equivalent of Ohm’s law:

    where R, denotes the porous-film resistance (per unit

    length), and 1, the porous-film thickness. The resist-

    ance R, is a function of the electrolyte conductivity

    and film porosity and tortuosity. The total potential

    drop

    V - q5p

    across a duplex film is divided between

    the compact and porous layers, with an increase in

    applied potential generally resulting in an increase in

    the thickness of both regions.

    In the special case of a porous film only, the over-

    potential for charge transfer at the metal electrolyte

    solution within the pores is generally not negligible.

    In this case, one can reinterpret the potential 4. as

    that of an appropriate reference electrode located in

    the electrolyte solution in the pores just outside the

    electric double layer at the metal/electrolyte inter-

    face. For Tafel kinetics, the following steady-stae

    expression can be used

    t =

    i, exp(b( V - ))

    (4)

    where b denotes a Tafel constant,

    i,

    an appropriate

    exchange-current density, and t: the film porosity

    (included to represent the fact that charge transfer

    occurs only on the fraction of the metal surface

    exposed to electrolyte solution in the pores). Use of

    the same symbols

    i,

    and b. is intended to emphasize

    the considerable similarity between the expressions

    for high-field conduction (compact film) and Tafel

    kinetics (porous film). Despite these similarities, there

    are important differences between the two limiting

    cases. In the case of a porous layer alone with Tafel

    kinetics, for example, it is not possible to alter the

    value of the Tafel costant h by changing the film

    thickness, whereas in a compact film model the

    equivalent constant r/i, in the solid-state conduc-

    tion expression is inversely proportional to thick-

    ness. This difference is essential in the determination

    of the size of the high-frequency loop in the imped-

    ance diagrams because of its influence on the effec-

    tive charge-transfer resistance.

    In the absence of a compact film, the value of

    V - 4. cannot vary along the limiting-current

    plateau, and all of the necessary potential drop must

    be obtained by thickening of the porous layer alone.

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    Modeling of impedance mechanisms

    397

    In addition, the double-layer capacity in the absence

    of a compact film no longer represents the charging

    of a solid dielectric material, but rather the charging

    of a metal-electrolyte interface on the exposed area

    beneath the pores. This charging contribution can be

    added to the Tafel expression in the porous film

    model to yield

    :

    i

    - = i0 ew(W - I) +

    c,,

    d(V - 44

    E

    dr

    (9

    where C,, denotes the capacity of the electric double

    layer at the metal/electrolyte interface.

    A final source of potential drop is the electrolyte

    solution between the electrode surface and the posi-

    tion of the reference electrode used to measure the

    applied potential. The current density can be

    expressed in terms of the electrolyte resistance as

    follows:

    (6)

    where R, represents the effective ohmic resistance of

    the electrolyte from the dissolving metal electrode to

    the position of the reference electrode in the bulk

    electrolyte. This ohmic resistance depends on the

    geometry of the experimental system and on the con-

    ductivity of the electrolyte, and can be affected by

    current-distribution effects which differ considerably

    between the porous-film and compact-film models.

    In particular, in high-frequency impedance measure-

    ments,

    R,

    represents essentially the ohmic resistance

    for the passage of the double-layer charging current

    through the electrolyte. In the case of a totally

    compact dielectric film, it is the salt film itself which

    is charged to create the electric field necessary for

    solid-state ionic conduction. As a result, the surface to

    be charged is in direct contact with the ohmic resist-

    ance of the bulk electrolyte solution. The resistance

    R, should correspond in that case to the equivalent

    resistance measured in the absence of a film and

    should not be affected by the thickness of the

    compact layer.

    The case of a porous or duplex film is different. If

    the porous layer is thick enough to present a signifi-

    cant ohmic resistance, that resistance will be placed in

    series with the bulk electrolyte since double-layer

    charging takes place beneath the porous layer. This

    additional resistance has two effects. The first effect

    is a linear increase in the high-frequency ohmic

    resistance with increasing film thickness, an increase

    not observed for compact films. The second effect is

    more subtle and is related to the influence of the film

    resistance on the distribution of the current lines in

    the bulk electrolyte. In the case of a disk electrode,

    for example, the presence of a significant surface

    resistance in series with double-layer charging will

    tend to create a more uniform distribution of current

    lines by drawing more current toward the center of

    the disk. In the limit where the porous film resistance

    is significant enough to create a completely uniform

    distribution along the outer film surface, the effective

    ohmic resistance for the electrolyte alone (for a refer-

    ence placed far from the surface) will increase by

    approximately 27 per cent compared to the primary

    resistance in the absence of a film. This effect has

    been examined experimentally by Grimm et aI.[5] by

    extrapolation of the measured ohmic resistance in

    the presence of the film to the limit of zero film

    thickness and comparison of the result with the mea-

    sured electrolyte resistance in the absence of a film.

    THE ADSORBATE ACCEPTOR MODEL

    Figures 3 and 4 present schematically the

    adsorbate-acceptor model in a similar manner to the

    duplex film model in Figs 1 and 2. The system pre-

    sented shows uniform anodic dissolution of a metal-

    lic alloy M (for example Fe-15Cr) in an electrolyte

    containing a small quantity of acceptor species A.

    One can imagine (as in[6]) that the electrolyte is a

    concentrated solution of phosphoric and sulfuric

    ADSORBATE ACCEPTOR MODEL

    solvation :

    Reference

    I-

    ' dl

    d

    adsorbate

    double

    diffusion

    layer

    layer

    ‘MA bulk

    M = Fe-i 50

    A = H,O

    Fig. 3. Schematic illustration of the adsorbate-acceptor model

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    398

    M. MATLOSZ

    POTENTIAL DROP : ACCEPTOR MODEL

    Fig. 4. Sources of potential drop in acceptor systems.

    acid, and that the acceptor is water or a water-related

    species necessary for solvation of the dissolving

    cations. Contrary to the salt-film models, where the

    surface concentration is fixed by a saturation value,

    in this case the situation corresponds much more

    closely to the traditional limiting current observed in

    cathodic metal deposition. The limiting current is

    reached when the concentration of the acceptor

    species A drops to near zero at the electrode/solution

    interface. Due to the absence of the salt films, the

    transport processes are limited to diffusion of the

    acceptor species through the electrolyte diffusion

    layer.

    At the electrode surface, the dissolution mecha-

    nism consists of oxidation of the metal to adsorbed

    cations followed by solvation of the adsorbed ions

    by the acceptor species. Whereas in the salt-film

    model it is the thickening of the salt layer which

    leads to an increase in potential drop along the

    limiting-current plateau, in the adsorbate-acceptor

    model it is the accumulation of adsorbed ions on the

    surface which leads to blocking of the surface and a

    subsequent increase in overpotential for metal disso-

    lution.

    For transient measurements, a clear consequence

    of the absence of solid films on the electrode surface

    can be observed in the double-layer charging of the

    interface. The situation is similar to the porous-film

    model in the absence of a compact layer in that the

    charging phenomenon is related to the double-layer

    capacity of the metal/electrolyte interface. In the

    adsorbate acceptor model, however, the entire elec-

    trode surface is available and the double-layer con-

    tribution can be expressed simply as follows:

    4, = C,,

    d(I’ - 40)

    dt

    (7)

    where C,, denotes the double-layer capacity of the

    metal/electrolyte interface in the presence of the

    adsorbed cations. The presence of the adsorbed

    cations is not expected to alter dramatically the

    value of C,, in comparison with a typical metal/

    electrolvte interface. however. and the exnerimental

    measurements in[7] tend to support this view for the

    Fe-15Cr system. In salt-film systems, on the other

    hand, the measured capacities depend on film

    properties (thickness, porosity, dielectric constant)

    and can be much lower. In the experimental studies

    reported in[5], for example, the values of effective

    double-layer capacity (and the corresponding RC

    time constants) were so low that complete measure-

    ment of the high-frequency loops in the impedance

    diagrams could not be achieved in the frequency

    range of the experimental apparatus.

    The adsorbate-acceptor model exhibits specific

    characteristic behavior for the charge-transfer resist-

    ance as well. For metal dissolution with Tafel

    kinetics, for example, but with the additional

    requirement that free surface sites must be available

    for the adsorbed oxidized species, the steady-state

    rate of anodic oxidation will drop with increasing

    coverage as follows:

    i,, = i, exp(b(V - &J) . (1 - 0)

    (8)

    where 0 denotes the surface coverage by the

    adsorbed intermediates. The current density at a

    given potential depends not only on the kinetic

    expression, but also on the mass balance for adsorb-

    ate and acceptor species. At steady state, the rate of

    production of adsorbed species by equation (5) must

    equal their rate of consumption by solvation. In par-

    ticular, with kinetics for solvation first order in both

    acceptor molecules and adsorbed cations:

    s= c uO

    where z denotes the cation valence, F the Faraday

    constant,

    k

    a rate constant for solvation (assumed

    results from the equivalence of acceptor transport

    independent of potential), cb the bulk concentration

    of acceptor molecules, and u the ratio of surface to

    bulk acceptor concentration. Equation (6) illustrates

    the coupling that occurs in the acceptor mechanism

    between the rate of mass transport of acceptor

    species and the rate of cation solvation. Determi-

    nation of the surface concentration of acceptor (u)

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    Modeling of impedance mechanisms

    399

    and the steady-state current:

    43s

    DC ~ - u)

    -=

    i F

    rnd

    where D denotes the acceptor diffusion coefficient, 6

    a diffusion-layer thickness and M the number of

    acceptor molecules needed to solvate a single

    cationic species.

    Along the limiting-current plateau (u < l), the

    current density is essentially constant and limited by

    the rate of arrival of acceptor molecules at the elec-

    trode surface. The surface coverage rises quickly, and

    the group 1 - U (the fraction of free surface sites)

    drops exponentially with increasing potential:

    1 - 0 = 5 exp(-b(V - &)).

    As a result, and contrary to what one would expect

    for normal Tafel kinetics in the absence of surface

    blocking, the effective charge-transfer resistance does

    not drop with increasing potential, but instead

    remains perfectly constant along the limiting-current

    plateau. This feature is characteristic of a blocking

    mechanism and can be observed in porous-salt-film

    models as well. In the porous-film models, however,

    the effect is not due to a rise in surface overpotential.

    Rather, a change in applied external potential simply

    does not alter the true surface overpotential beneath

    the film, since all of the potential difference is elimi-

    nated by additional ohmic drop due to growth of the

    porous layer.

    The situation for a compact salt film is qualit-

    atively different. Increasing applied potential in a

    compact film system results in an increase in thick-

    ness 1,) and a corresponding increase in the charge-

    transfer resistance through the group &/u. As a

    result, a change in applied potential results in a

    strong variation in charge-transfer resistance which

    is observed neither in porous-film models nor in

    acceptor models.

    NYQUIST DIAGRAM

    SALT FILM MODEL

    DISTINGUISHING FEATURES OF THE

    IMPEDANCE DIAGRAMS

    The features pointed out in the discussion above

    concerning ohmic resistances, charge-transfer resist-

    ances, and double-layer capacities can be examined

    directly with impedance measurements, and can be

    used to establish experimental criteria to distinguish

    between the different models. Figures 5 and 6 present

    the general shapes of the impedance diagrams

    obtained with the salt-film and adsorbate-acceptor

    systems, respectively. The most important overall

    feature of the diagrams concerns the difference in

    low-frequency behavior between the adsorbate-

    acceptor model and the salt-film models. Despite the

    complexity of the transport processes involved, the

    impedance behavior of the salt-film models is rela-

    tively simple. At high frequencies, charge-transfer

    processes (Tafel kinetics for the porous film, solid-

    state ionic conduction for the compact film) domi-

    nate the response since the film does not have time

    to grow or shrink and remains essentially unchanged

    during modulation. As the lower frequencies are

    approached, film thickening and thinning processes

    begin to play an ever greater role, and at the very

    lowest frequencies the system behaves essentially as a

    pure capactor with the film growing and shrinking in

    response to the oscillating signal.

    The adsorbate-acceptor system is quite different.

    At the highest frequencies charge-transfer and

    double-layer processes dominate, but as the fre-

    quency is lowered additional features related to time

    constants for the rate of change of surface coverage

    begin to appear. At the very lowest frequencies, a

    large third loop appears containing contributions

    from an underlying Warburg-Nernst impedance.

    The Warburg-Nernst loop is due to variations in

    surface acceptor concentration as a result of the

    oscillations in surface flux. It is interesting to note

    that such effects are impossible in the salt-film

    models, since the surface cation concentration in

    those models is fixed at its saturation value and

    Fig. 5. General shape of the Nyquist diagrams in salt-film systems.

    EA 40 4 O

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    400

    M. MATLOSZ

    NYQUIST DIAGRAM : ACCEPTOR MODEL

    Fig. 6. General shape of the Nyquist diagrams in acceptor systems.

    cannot be affected by the oscillating flux. This differ-

    ence between the salt-film and acceptor models is

    very striking, but it can only be observed with low-

    frequency data that may be difficult to obtain in a

    polishing system undergoing high-rate dissolution. It

    is therefore of interest to compare more easily

    obtainable and reproducible data that can be mea-

    sured at high frequencies.

    At high frequencies, all of the models yield

    Nyquist diagrams of essentially the same shape, a

    semicircle displaced to the right of the origin. The

    position of the high-frequency limit of the semicircle

    R,,

    the diameter of the circle R, and the effective

    capacity C,, determined from the angular frequency

    at the top of the semicircle w = l/R,C,, provide

    three characteristic values that can be measured

    easily and compared in light of the theory for the

    different models. Table 1 summarizes the results

    from the theoretical analyses in [S] and [6].

    Since all three models yield similar diagrams at

    high frequency, it is not possible to distinguish

    between them based on the shape of a single imped-

    ance spectrum. The results in Table 1 can be used,

    however, to determine expected trends for targeted

    experiments aimed at comparing impedance spectra

    obtained at different steady-state operating condi-

    tions. Consider, for example, a series of impedance

    diagrams obtained at different total applied poten-

    Table 1. Characteristic features of the high-frequency loops

    Salt-Film Models

    Porous Film Compact Film

    Adsorbate-

    Acceptor

    Model

    tials along the limiting-current plateau. Under condi-

    tions of constant

    convective diffusion, the

    limiting-current value is essentially unchanged. For

    compact or porous-film models, increasing total

    applied potential at constant limiting current density

    must result in an increase in the corresponding film

    thicknesses. Similarly, for the adsorbate-acceptor

    model, an increase in applied potential should result

    in an increase in the adsorbate surface coverage. The

    results in Table 1 for an increase in 1, and 1, indi-

    cate an increase in

    R,

    but no change in

    R,

    and C,

    for a porous-film model, whereas for a compact film

    the same experiment should yield an increase in

    R,,

    a decrease in C, but no change in

    R,.

    For an

    adsorbate-acceptor model, none of the parameters

    should vary.

    An alternative series of impedance diagrams can

    be obtained at a fixed applied potential (corrected

    for the ohmic drop i,,

    R,),

    but at varying convective

    diffusion conditions. For a rotating disk electrode,

    for example, one can increase the disk rotation

    speed, which will result in an increase in the steady-

    state current density i,, (proportional to the square

    root of disk rotation speed). For constant applied

    potential, the incease in steady-state current will lead

    to a decrease in salt-film thickness and both factors

    will play a role in the behavior of the diagrams. For

    a porous-film system, Table 1 reveals that

    R,

    and

    R,

    should decrease while C, should remain unchanged.

    For a compact film,

    R,

    should remain unchanged,

    C, increase and

    R,

    decrease. Finally, for the

    adsorbate-acceptor model,

    R,

    and C, should remain

    unchanged, while

    R,

    should decrease (propor-

    tionately to the square root of the disk rotation

    speed). Each of these effects has a clear explanation

    in the underlying physical models as described above

    and can be related directly to the parameters of the

    experimental system under study. Experimental

    investigations of this type have been undertaken on

    both salt-film and acceptor systems and have pro-

    vided considerable support for the physical pictures

    of the polishing mechanisms described above.

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    Modeling of impedance mechanisms 401

    CONCLUSIONS

    tion will be of general use in the study of a wide

    range of electropolishing systems of practical and

    Theoretical analyses of the underlying physical scientific importance.

    bases of simple salt-film and acceptor models have

    resulted in identification of important qualitative dif-

    ferences between the models that are independent of

    the specific property parameters for a given electro-

    polishing system. Targeted experiments aimed at

    studying the variation in alternating current imped-

    ance spectra as a function of steady-state operating

    conditions such as applied potential and hydrody-

    namic conditions can be used to elucidate the

    mechanism. The results of such experimental studies

    can provide fundamental information concerning the

    mechanisms of electropolishing on a qualitative basis

    without recourse to extensive fitting of the model

    parameters. It is hoped that the physical picture of

    the polishing process presented here and the corre-

    sponding methodology for experimental investiga-

    REFERENCES

    1. H. Figour and P. A. Jacquet, French Patent No. 707526

    (1930).

    2. P. A. Jacquet, Nature 135, 1076 (1935).

    3. P. A. Jacquet, Trans. Electrochemical Society 69, 639

    (1936).

    4. D. Landolt, Electrochim. Acta 32, 1 (1987).

    5. R.-D. Grimm, A. West and D. Landolt, J. electrochem.

    Sot., 139, 1622 (1992).

    6. M. Matlosz, S. Magaino and D. Landolt, J. electrochem.

    sot., 141,410 (1994).

    7. S. Magaino, M. Matlosz and D. Landolt, J. electrochem.

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